As a microscopic "eye-seeking" instrument in the micro-world, industrial scanning electron microscopy has gradually improved its performance in the past two decades, but there is still room for original innovation from 0 to 1. Industrial electron microscopy plays a pivotal role in providing new tools for China's new industries from "following and running" to "leading".
This paper introduces the performance indicators, functional characteristics and typical application examples of the new industrial scanning electron microscope (SEM), focusing on the innovation from the overall design to the key components, from the guiding concept to the manufacturing level.
First, the performance indicatorsUltra-high speed, resolution and applicability are the three elements of modern electron microscopy. The domestic industrial scanning electron microscope imaging rate achieves a single channel of 100M pixels/second. Secondary electron (SE) and backscattered electron (BSE) simultaneous imaging up to 2x100M pixels/second. Camera capability is 2x200 frames/sec @512x512, or 2x60 frames/sec @1024x1024, twice the video HD imaging. The electron microscope not only can quickly generate high-definition images in a wide range of two channels in 1.2 seconds, but also can observe the dynamic process of capturing samples.
The main performance parameters of domestic industrial scanning electron microscope are as follows:
Table 1 Main performance indicators of domestic industrial scanning electron microscope
Figure 1 shows images of two electron microscopy images of the Drosophila brain nerve cell slices scanned by backscattered signals (BSE) under the same conditions, with a focus on imaging rates. In the case of ensuring that both of them can observe the clear image of the biological tissue, the image on the right is an image of a well-known foreign brand scanning electron microscope, and an ultra-high-definition image of 8000 pixels X6000 pixels is acquired, and the imaging time is 43500 ms (890 ns/pixel), bundle Flow 1.5nA. The left picture shows the 8000 pixel X8000 pixel ultra-high definition image acquired by the domestic industrial scanning electron microscope for the same sample. The imaging speed is 412ms (6.13ns/pixel) and the beam current is 1.5nA. Domestic industrial electron mirrors are a hundred times faster.
Figure 1 Comparison of scanning imaging rates of different biological tissues by different SEM under the same conditions
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